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Woven Wire Mesh Application: The Engine of Ultra-Precision Manufacturing

Sep 28,2024

Scope: Linear motor drives for wafer stages in lithography, C-axis rotation in 5-axis CNC, transmission chains for CMMs

For semiconductor wafer processing, zero-backlash harmonic drives with linear motors achieve ±0.1μm repeatability while limiting temperature rise to 0.5℃/hr for exposure alignment. Vacuum-compatible design (10⁻⁶ Pa) meets EUV lithography requirements.

Cycloidal reducers for aerospace components utilize phase-corrected gears to eliminate high-frequency vibration, enabling 0.5μm roundness in turning 30m-long aero-engine shafts with surface roughness Ra≤0.025μm.

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The Engine of Ultra-Precision Manufacturing

Scope: Linear motor drives for wafer stages in lithography, C-axis rotation in 5-axis CNC, transmission chains for CMMs

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